diff --git a/.eslintignore b/.eslintignore
new file mode 100644
index 00000000..3e795e7a
--- /dev/null
+++ b/.eslintignore
@@ -0,0 +1,4 @@
+dist
+playground-temp
+temp
+
diff --git a/.eslintrc.cjs b/.eslintrc.cjs
index d5050bd4..bb48bf9c 100644
--- a/.eslintrc.cjs
+++ b/.eslintrc.cjs
@@ -125,7 +125,7 @@ module.exports = defineConfig({
       }
     },
     {
-      files: ['packages/create-vite/template-*/**'],
+      files: ['packages/create-vite/template-*/**', '**/build.config.ts'],
       rules: {
         'node/no-missing-import': 'off'
       }
diff --git a/.github/workflows/ci.yml b/.github/workflows/ci.yml
index 05813fbd..7a329e3c 100644
--- a/.github/workflows/ci.yml
+++ b/.github/workflows/ci.yml
@@ -66,14 +66,8 @@ jobs:
       - name: Install Playwright
         run: pnpm playwright install
 
-      - name: Build vite
-        run: pnpm run ci-build-vite
-
-      - name: Build plugin-vue
-        run: pnpm run build-plugin-vue
-
-      - name: Build plugin-react
-        run: pnpm run build-plugin-react
+      - name: Build
+        run: pnpm run build
 
       - name: Test unit
         run: pnpm run test-unit
@@ -107,11 +101,8 @@ jobs:
         env:
           PLAYWRIGHT_SKIP_BROWSER_DOWNLOAD: "1"
 
-      - name: Prepare
-        run: |
-          pnpm run ci-build-vite
-          pnpm run build-plugin-vue
-          pnpm run build-plugin-react
+      - name: Build
+        run: pnpm run build
 
       - name: Lint
         run: pnpm run lint
diff --git a/.prettierignore b/.prettierignore
index a2c1f98c..0d548735 100644
--- a/.prettierignore
+++ b/.prettierignore
@@ -1,12 +1,8 @@
-docs/.vitepress/dist/
-packages/vite/dist/
-packages/vite/temp/
-packages/plugin-react/dist/
-packages/plugin-vue/dist/
 packages/*/CHANGELOG.md
 playground-temp/
+dist/
+temp/
 LICENSE.md
-.prettierignore
 pnpm-lock.yaml
 pnpm-workspace.yaml
 playground/tsconfig-json-load-error/has-error/tsconfig.json
diff --git a/package.json b/package.json
index 92a5fd2e..dd19523d 100644
--- a/package.json
+++ b/package.json
@@ -16,6 +16,7 @@
     "preinstall": "npx only-allow pnpm",
     "format": "prettier --write .",
     "lint": "eslint packages/*/{src,types}/** playground/**/__tests__/** scripts/**",
+    "typecheck": "tsc -p scripts --noEmit && tsc -p playground --noEmit",
     "test": "run-s test-unit test-serve test-build",
     "test-serve": "vitest run -c vitest.config.e2e.ts",
     "test-build": "cross-env VITE_TEST_BUILD=1 vitest run -c vitest.config.e2e.ts",
@@ -23,21 +24,18 @@
     "debug-serve": "cross-env VITE_DEBUG_SERVE=1 vitest run -c vitest.config.e2e.ts",
     "debug-build": "cross-env VITE_TEST_BUILD=1 VITE_PRESERVE_BUILD_ARTIFACTS=1 vitest run -c vitest.config.e2e.ts",
     "docs": "vitepress dev docs",
-    "build-docs": "vitepress build docs",
-    "serve-docs": "vitepress serve docs",
+    "docs-build": "vitepress build docs",
+    "docs-serve": "vitepress serve docs",
+    "build": "pnpm -r --filter=./packages/* run build",
+    "dev": "pnpm -r --parallel --filter=./packages/* run dev",
     "release": "ts-node scripts/release.ts",
     "ci-publish": "ts-node scripts/publishCI.ts",
-    "typecheck": "tsc -p scripts --noEmit && tsc -p playground --noEmit",
-    "build": "run-s build-vite build-plugin-vue build-plugin-react",
-    "build-vite": "cd packages/vite && npm run build",
-    "build-plugin-vue": "cd packages/plugin-vue && npm run build",
-    "build-plugin-react": "cd packages/plugin-react && npm run build",
-    "ci-build-vite": "cd packages/vite && npm run ci-build",
-    "ci-docs": "run-s build-vite build-plugin-vue build-docs"
+    "ci-docs": "run-s build docs-build"
   },
   "devDependencies": {
     "@microsoft/api-extractor": "^7.23.1",
     "@types/babel__core": "^7.1.19",
+    "@types/babel__standalone": "^7.1.4",
     "@types/convert-source-map": "^1.5.2",
     "@types/cross-spawn": "^6.0.2",
     "@types/debug": "^4.1.7",
@@ -83,6 +81,7 @@
     "sirv": "^2.0.2",
     "ts-node": "^10.7.0",
     "typescript": "^4.6.4",
+    "unbuild": "^0.7.4",
     "vite": "workspace:*",
     "vitepress": "^0.22.4",
     "vitest": "^0.12.4",
diff --git a/packages/plugin-vue-jsx/build.config.ts b/packages/plugin-vue-jsx/build.config.ts
new file mode 100644
index 00000000..6dcf1a5a
--- /dev/null
+++ b/packages/plugin-vue-jsx/build.config.ts
@@ -0,0 +1,10 @@
+import { defineBuildConfig } from 'unbuild'
+
+export default defineBuildConfig({
+  entries: ['src/index'],
+  clean: true,
+  declaration: true,
+  rollup: {
+    emitCJS: true
+  }
+})
diff --git a/packages/plugin-vue-jsx/index.d.ts b/packages/plugin-vue-jsx/index.d.ts
deleted file mode 100644
index a702c09b..00000000
--- a/packages/plugin-vue-jsx/index.d.ts
+++ /dev/null
@@ -1,14 +0,0 @@
-import type { Plugin } from 'vite'
-import type { VueJSXPluginOptions } from '@vue/babel-plugin-jsx'
-import type { FilterPattern } from '@rollup/pluginutils'
-
-declare interface FilterOptions {
-  include?: FilterPattern
-  exclude?: FilterPattern
-}
-
-declare function createPlugin(
-  options?: VueJSXPluginOptions & FilterOptions & { babelPlugins?: any[] }
-): Plugin
-
-export default createPlugin
diff --git a/packages/plugin-vue-jsx/package.json b/packages/plugin-vue-jsx/package.json
index f62a6cd9..6dbd1138 100644
--- a/packages/plugin-vue-jsx/package.json
+++ b/packages/plugin-vue-jsx/package.json
@@ -4,11 +4,24 @@
   "license": "MIT",
   "author": "Evan You",
   "files": [
-    "index.js",
-    "index.d.ts"
+    "dist"
   ],
-  "main": "index.js",
-  "types": "index.d.ts",
+  "main": "./dist/index.cjs",
+  "module": "./dist/index.mjs",
+  "types": "./dist/index.d.ts",
+  "exports": {
+    ".": {
+      "types": "./dist/index.d.ts",
+      "import": "./dist/index.mjs",
+      "require": "./dist/index.cjs"
+    }
+  },
+  "scripts": {
+    "dev": "unbuild --stub",
+    "build": "unbuild && pnpm run patch-cjs",
+    "patch-cjs": "ts-node ../../scripts/patchCJS.ts",
+    "prepublishOnly": "npm run build"
+  },
   "engines": {
     "node": ">=14.6.0"
   },
@@ -28,6 +41,9 @@
     "@rollup/pluginutils": "^4.2.1",
     "@vue/babel-plugin-jsx": "^1.1.1"
   },
+  "devDependencies": {
+    "vite": "workspace:*"
+  },
   "peerDependencies": {
     "vite": "^2.0.0",
     "vue": "^3.0.0"
diff --git a/packages/plugin-vue-jsx/index.js b/packages/plugin-vue-jsx/src/index.ts
similarity index 81%
rename from packages/plugin-vue-jsx/index.js
rename to packages/plugin-vue-jsx/src/index.ts
index 41fcb911..e23f0031 100644
--- a/packages/plugin-vue-jsx/index.js
+++ b/packages/plugin-vue-jsx/src/index.ts
@@ -1,10 +1,16 @@
-// @ts-check
-const babel = require('@babel/core')
-const jsx = require('@vue/babel-plugin-jsx')
-const importMeta = require('@babel/plugin-syntax-import-meta')
-const { createFilter, normalizePath } = require('@rollup/pluginutils')
-const { createHash } = require('crypto')
-const path = require('path')
+import { createHash } from 'crypto'
+import path from 'path'
+import type { types } from '@babel/core'
+import babel from '@babel/core'
+import jsx from '@vue/babel-plugin-jsx'
+// @ts-expect-error missing type
+import importMeta from '@babel/plugin-syntax-import-meta'
+import { createFilter, normalizePath } from '@rollup/pluginutils'
+import type { ComponentOptions } from 'vue'
+import type { Plugin } from 'vite'
+import type { Options } from './types'
+
+export * from './types'
 
 const ssrRegisterHelperId = '/__vue-jsx-ssr-register-helper'
 const ssrRegisterHelperCode =
@@ -14,10 +20,8 @@ const ssrRegisterHelperCode =
 /**
  * This function is serialized with toString() and evaluated as a virtual
  * module during SSR
- * @param {import('vue').ComponentOptions} comp
- * @param {string} filename
  */
-function ssrRegisterHelper(comp, filename) {
+function ssrRegisterHelper(comp: ComponentOptions, filename: string) {
   const setup = comp.setup
   comp.setup = (props, ctx) => {
     // @ts-ignore
@@ -29,17 +33,7 @@ function ssrRegisterHelper(comp, filename) {
   }
 }
 
-/**
- * @typedef { import('@rollup/pluginutils').FilterPattern} FilterPattern
- * @typedef { { include?: FilterPattern, exclude?: FilterPattern, babelPlugins?: any[] } } CommonOptions
- */
-
-/**
- *
- * @param {import('@vue/babel-plugin-jsx').VueJSXPluginOptions & CommonOptions} options
- * @returns {import('vite').Plugin}
- */
-function vueJsxPlugin(options = {}) {
+function vueJsxPlugin(options: Options = {}): Plugin {
   let root = ''
   let needHmr = false
   let needSourceMap = true
@@ -110,31 +104,28 @@ function vueJsxPlugin(options = {}) {
           sourceMaps: needSourceMap,
           sourceFileName: id,
           configFile: false
-        })
+        })!
 
         if (!ssr && !needHmr) {
+          if (!result.code) return
           return {
             code: result.code,
             map: result.map
           }
         }
 
+        interface HotComponent {
+          local: string
+          exported: string
+          id: string
+        }
+
         // check for hmr injection
-        /**
-         * @type {{ name: string }[]}
-         */
-        const declaredComponents = []
-        /**
-         * @type {{
-         *  local: string,
-         *  exported: string,
-         *  id: string,
-         * }[]}
-         */
-        const hotComponents = []
+        const declaredComponents: { name: string }[] = []
+        const hotComponents: HotComponent[] = []
         let hasDefault = false
 
-        for (const node of result.ast.program.body) {
+        for (const node of result.ast!.program.body) {
           if (node.type === 'VariableDeclaration') {
             const names = parseComponentDecls(node, code)
             if (names.length) {
@@ -204,7 +195,7 @@ function vueJsxPlugin(options = {}) {
         if (hotComponents.length) {
           if (hasDefault && (needHmr || ssr)) {
             result.code =
-              result.code.replace(
+              result.code!.replace(
                 /export default defineComponent/g,
                 `const __default__ = defineComponent`
               ) + `\nexport default __default__`
@@ -239,6 +230,7 @@ function vueJsxPlugin(options = {}) {
           }
         }
 
+        if (!result.code) return
         return {
           code: result.code,
           map: result.map
@@ -248,11 +240,7 @@ function vueJsxPlugin(options = {}) {
   }
 }
 
-/**
- * @param {import('@babel/core').types.VariableDeclaration} node
- * @param {string} source
- */
-function parseComponentDecls(node, source) {
+function parseComponentDecls(node: types.VariableDeclaration, source: string) {
   const names = []
   for (const decl of node.declarations) {
     if (decl.id.type === 'Identifier' && isDefineComponentCall(decl.init)) {
@@ -264,10 +252,7 @@ function parseComponentDecls(node, source) {
   return names
 }
 
-/**
- * @param {import('@babel/core').types.Node} node
- */
-function isDefineComponentCall(node) {
+function isDefineComponentCall(node?: types.Node | null) {
   return (
     node &&
     node.type === 'CallExpression' &&
@@ -276,13 +261,8 @@ function isDefineComponentCall(node) {
   )
 }
 
-/**
- * @param {string} text
- * @returns {string}
- */
-function getHash(text) {
+function getHash(text: string) {
   return createHash('sha256').update(text).digest('hex').substring(0, 8)
 }
 
-module.exports = vueJsxPlugin
-vueJsxPlugin.default = vueJsxPlugin
+export default vueJsxPlugin
diff --git a/packages/plugin-vue-jsx/src/types.ts b/packages/plugin-vue-jsx/src/types.ts
new file mode 100644
index 00000000..aa30b743
--- /dev/null
+++ b/packages/plugin-vue-jsx/src/types.ts
@@ -0,0 +1,10 @@
+import type { VueJSXPluginOptions } from '@vue/babel-plugin-jsx'
+import type { FilterPattern } from '@rollup/pluginutils'
+
+export interface FilterOptions {
+  include?: FilterPattern
+  exclude?: FilterPattern
+}
+
+export type Options = VueJSXPluginOptions &
+  FilterOptions & { babelPlugins?: any[] }
diff --git a/packages/plugin-vue-jsx/tsconfig.json b/packages/plugin-vue-jsx/tsconfig.json
new file mode 100644
index 00000000..c20adf0d
--- /dev/null
+++ b/packages/plugin-vue-jsx/tsconfig.json
@@ -0,0 +1,19 @@
+{
+  "include": ["src"],
+  "exclude": ["**/*.spec.ts"],
+  "compilerOptions": {
+    "outDir": "dist",
+    "target": "ES2018",
+    "module": "CommonJS",
+    "moduleResolution": "Node",
+    "strict": true,
+    "declaration": true,
+    "sourceMap": true,
+    "noUnusedLocals": true,
+    "esModuleInterop": true,
+    "paths": {
+      "types/*": ["../vite/types/*"],
+      "vite": ["../vite/src/node/index.js"]
+    }
+  }
+}
diff --git a/packages/plugin-vue/api-extractor.json b/packages/plugin-vue/api-extractor.json
deleted file mode 100644
index df6d6f9a..00000000
--- a/packages/plugin-vue/api-extractor.json
+++ /dev/null
@@ -1,53 +0,0 @@
-{
-  "$schema": "https://developer.microsoft.com/json-schemas/api-extractor/v7/api-extractor.schema.json",
-
-  "projectFolder": ".",
-
-  "mainEntryPointFilePath": "./temp/index.d.ts",
-
-  "dtsRollup": {
-    "enabled": true,
-    "untrimmedFilePath": "./dist/index.d.ts"
-  },
-
-  "apiReport": {
-    "enabled": false
-  },
-
-  "docModel": {
-    "enabled": false
-  },
-
-  "tsdocMetadata": {
-    "enabled": false
-  },
-
-  "messages": {
-    "compilerMessageReporting": {
-      "default": {
-        "logLevel": "warning"
-      }
-    },
-
-    "extractorMessageReporting": {
-      "default": {
-        "logLevel": "warning",
-        "addToApiReportFile": true
-      },
-
-      "ae-missing-release-tag": {
-        "logLevel": "none"
-      }
-    },
-
-    "tsdocMessageReporting": {
-      "default": {
-        "logLevel": "warning"
-      },
-
-      "tsdoc-undefined-tag": {
-        "logLevel": "none"
-      }
-    }
-  }
-}
diff --git a/packages/plugin-vue/build.config.ts b/packages/plugin-vue/build.config.ts
new file mode 100644
index 00000000..4f9d811a
--- /dev/null
+++ b/packages/plugin-vue/build.config.ts
@@ -0,0 +1,12 @@
+import { defineBuildConfig } from 'unbuild'
+
+export default defineBuildConfig({
+  entries: ['src/index'],
+  externals: ['vite', 'vue/compiler-sfc', '@vue/compiler-sfc'],
+  clean: true,
+  declaration: true,
+  rollup: {
+    emitCJS: true,
+    inlineDependencies: true
+  }
+})
diff --git a/packages/plugin-vue/package.json b/packages/plugin-vue/package.json
index 22ce5ad5..6a08c1df 100644
--- a/packages/plugin-vue/package.json
+++ b/packages/plugin-vue/package.json
@@ -6,17 +6,21 @@
   "files": [
     "dist"
   ],
-  "main": "dist/index.js",
-  "types": "dist/index.d.ts",
+  "main": "./dist/index.cjs",
+  "module": "./dist/index.mjs",
+  "types": "./dist/index.d.ts",
+  "exports": {
+    ".": {
+      "types": "./dist/index.d.ts",
+      "import": "./dist/index.mjs",
+      "require": "./dist/index.cjs"
+    }
+  },
   "scripts": {
-    "dev": "rimraf dist && run-p dev-types dev-watch",
-    "dev-types": "tsc -p . -w --incremental --emitDeclarationOnly",
-    "dev-watch": "esbuild src/index.ts --watch --bundle --platform=node --target=node12 --external:@vue/compiler-sfc --external:vue/compiler-sfc --external:vite --outfile=dist/index.js",
-    "build": "rimraf dist && run-s build-bundle build-types",
-    "build-bundle": "esbuild src/index.ts --bundle --platform=node --target=node12 --external:@vue/compiler-sfc --external:vue/compiler-sfc --external:vite --outfile=dist/index.js & npm run patch-dist",
-    "patch-dist": "ts-node ../../scripts/patchEsbuildDist.ts dist/index.js vuePlugin",
-    "build-types": "tsc -p . --emitDeclarationOnly --outDir temp && api-extractor run && rimraf temp",
-    "prepublishOnly": "(cd ../vite && npm run build) && npm run build"
+    "dev": "unbuild --stub",
+    "build": "unbuild && pnpm run patch-cjs",
+    "patch-cjs": "ts-node ../../scripts/patchCJS.ts",
+    "prepublishOnly": "npm run build"
   },
   "engines": {
     "node": ">=14.6.0"
@@ -40,6 +44,7 @@
     "rollup": "^2.72.1",
     "slash": "^4.0.0",
     "source-map": "^0.6.1",
-    "vue": "^3.2.33"
+    "vue": "^3.2.33",
+    "vite": "workspace:*"
   }
 }
diff --git a/packages/plugin-vue/src/index.ts b/packages/plugin-vue/src/index.ts
index 7bdf63b7..6526f941 100644
--- a/packages/plugin-vue/src/index.ts
+++ b/packages/plugin-vue/src/index.ts
@@ -18,7 +18,8 @@ import { transformTemplateAsModule } from './template'
 import { transformStyle } from './style'
 import { EXPORT_HELPER_ID, helperCode } from './helper'
 
-export { parseVueRequest, VueQuery } from './utils/query'
+export { parseVueRequest } from './utils/query'
+export type { VueQuery } from './utils/query'
 
 export interface Options {
   include?: string | RegExp | (string | RegExp)[]
@@ -250,10 +251,3 @@ export default function vuePlugin(rawOptions: Options = {}): Plugin {
     }
   }
 }
-
-// overwrite for cjs require('...')() usage
-// The following lines are inserted by scripts/patchEsbuildDist.ts,
-// this doesn't bundle correctly after esbuild 0.14.4
-//
-// module.exports = vuePlugin
-// vuePlugin['default'] = vuePlugin
diff --git a/packages/plugin-vue/tsconfig.json b/packages/plugin-vue/tsconfig.json
index fa388fd0..6165780e 100644
--- a/packages/plugin-vue/tsconfig.json
+++ b/packages/plugin-vue/tsconfig.json
@@ -14,9 +14,8 @@
     "esModuleInterop": true,
     "baseUrl": ".",
     "paths": {
-      // vite typings uses custom paths that is patched into relative paths during build
-      // this is a shim that makes even dev-time vite typings work for plugin-vue
-      "types/*": ["../vite/types/*"]
+      "types/*": ["../vite/types/*"],
+      "vite": ["../vite/src/node/index.js"]
     }
   }
 }
diff --git a/scripts/patchCJS.ts b/scripts/patchCJS.ts
new file mode 100644
index 00000000..76edf3fc
--- /dev/null
+++ b/scripts/patchCJS.ts
@@ -0,0 +1,57 @@
+/**
+
+It converts
+
+```ts
+exports["default"] = vuePlugin;
+exports.parseVueRequest = parseVueRequest;
+```
+
+to
+
+```ts
+module.exports = vuePlugin;
+module.exports["default"] = vuePlugin;
+module.exports.parseVueRequest = parseVueRequest;
+```
+*/
+
+import { readFileSync, writeFileSync } from 'fs'
+import { bold, red } from 'picocolors'
+
+const indexPath = 'dist/index.cjs'
+let code = readFileSync(indexPath, 'utf-8')
+
+const matchMixed = code.match(/\nexports\["default"\] = (\w+);/)
+if (matchMixed) {
+  const name = matchMixed[1]
+
+  const lines = code.trimEnd().split('\n')
+
+  // search from the end to prepend `modules.` to `export[xxx]`
+  for (let i = lines.length - 1; i > 0; i--) {
+    if (lines[i].startsWith('exports')) lines[i] = 'module.' + lines[i]
+    else {
+      // at the beginning of exports, export the default function
+      lines[i] += `\nmodule.exports = ${name};`
+      break
+    }
+  }
+
+  writeFileSync(indexPath, lines.join('\n'))
+
+  console.log(bold(`${indexPath} CJS patched`))
+  process.exit()
+}
+
+const matchDefault = code.match(/\nmodule.exports = (\w+);/)
+
+if (matchDefault) {
+  code += `module.exports["default"] = ${matchDefault[1]};\n`
+  writeFileSync(indexPath, code)
+  console.log(bold(`${indexPath} CJS patched`))
+  process.exit()
+}
+
+console.error(red(`${indexPath} CJS patch failed`))
+process.exit(1)
diff --git a/scripts/patchEsbuildDist.ts b/scripts/patchEsbuildDist.ts
deleted file mode 100644
index 6ad2803c..00000000
--- a/scripts/patchEsbuildDist.ts
+++ /dev/null
@@ -1,31 +0,0 @@
-// esbuild 0.14.4 https://github.com/evanw/esbuild/blob/master/CHANGELOG.md#0144 introduced a
-// change that breaks the "overwrite for cjs require('...')() usage" hack used in plugin-vue
-// and plugin-react. For the moment, we can remove the extra exports code added in 0.14.4 to
-// continue using it.
-
-import { readFileSync, writeFileSync } from 'fs'
-import { bold, red } from 'picocolors'
-
-const indexPath = process.argv[2]
-const varName = process.argv[3]
-
-let code = readFileSync(indexPath, 'utf-8')
-
-const moduleExportsLine = `module.exports = __toCommonJS(src_exports);`
-
-if (code.includes(moduleExportsLine)) {
-  // overwrite for cjs require('...')() usage
-  code = code.replace(
-    moduleExportsLine,
-    `module.exports = ${varName};
-${varName}['default'] = ${varName};`
-  )
-
-  writeFileSync(indexPath, code)
-
-  console.log(
-    bold(`${indexPath} patched with overwrite for cjs require('...')()`)
-  )
-} else {
-  console.error(red(`${indexPath} post-esbuild bundling patch failed`))
-}