-
Notifications
You must be signed in to change notification settings - Fork 0
/
vacuum.drawio
183 lines (183 loc) · 15.9 KB
/
vacuum.drawio
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
142
143
144
145
146
147
148
149
150
151
152
153
154
155
156
157
158
159
160
161
162
163
164
165
166
167
168
169
170
171
172
173
174
175
176
177
178
179
180
181
182
183
<mxfile host="app.diagrams.net" modified="2022-09-18T12:40:50.259Z" agent="5.0 (Macintosh; Intel Mac OS X 10_15_7) AppleWebKit/537.36 (KHTML, like Gecko) Chrome/105.0.0.0 Safari/537.36" etag="xd6lZXe1mxYJ47qGbmY0" version="20.3.2" type="github">
<diagram id="EJDTuElmcnAi4WPFWQzJ" name="Page-1">
<mxGraphModel dx="1763" dy="1179" grid="0" gridSize="10" guides="1" tooltips="1" connect="1" arrows="1" fold="1" page="1" pageScale="1" pageWidth="850" pageHeight="1100" math="0" shadow="0">
<root>
<mxCell id="0" />
<mxCell id="1" parent="0" />
<mxCell id="JQe-0Pjy612eNR-_QcZm-43" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;exitX=0.5;exitY=1;exitDx=0;exitDy=0;entryX=1;entryY=0.5;entryDx=0;entryDy=0;" edge="1" parent="1" source="flRVxpR7cwWonaM8a4Yf-1" target="flRVxpR7cwWonaM8a4Yf-2">
<mxGeometry relative="1" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-44" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;exitX=0.5;exitY=1;exitDx=0;exitDy=0;entryX=0;entryY=0.5;entryDx=0;entryDy=0;" edge="1" parent="1" source="flRVxpR7cwWonaM8a4Yf-1" target="flRVxpR7cwWonaM8a4Yf-4">
<mxGeometry relative="1" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-1" value="真空泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#6a00ff;fontColor=#ffffff;strokeColor=#3700CC;" parent="1" vertex="1">
<mxGeometry x="790" y="76" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-2" value="气体传输(真空泵)" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#d80073;strokeColor=#A50040;fontColor=#ffffff;" parent="1" vertex="1">
<mxGeometry x="510" y="186" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-45" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;exitX=0.5;exitY=1;exitDx=0;exitDy=0;" edge="1" parent="1" source="flRVxpR7cwWonaM8a4Yf-4" target="JQe-0Pjy612eNR-_QcZm-28">
<mxGeometry relative="1" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-4" value="气体粘合(真空泵)" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#0050ef;strokeColor=#001DBC;fontColor=#ffffff;" parent="1" vertex="1">
<mxGeometry x="1360" y="186" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-16" value="" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;" parent="1" target="flRVxpR7cwWonaM8a4Yf-15" edge="1">
<mxGeometry relative="1" as="geometry">
<mxPoint x="480" y="426" as="sourcePoint" />
</mxGeometry>
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-6" value="往复容积式真空泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="420" y="336" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-7" value="" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;" parent="1" source="flRVxpR7cwWonaM8a4Yf-2" target="flRVxpR7cwWonaM8a4Yf-6" edge="1">
<mxGeometry relative="1" as="geometry">
<Array as="points">
<mxPoint x="570" y="296" />
<mxPoint x="480" y="296" />
</Array>
</mxGeometry>
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-9" value="动能(真空泵)" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" parent="1" vertex="1">
<mxGeometry x="970" y="346" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-10" value="" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;" parent="1" source="flRVxpR7cwWonaM8a4Yf-2" target="flRVxpR7cwWonaM8a4Yf-9" edge="1">
<mxGeometry relative="1" as="geometry">
<Array as="points">
<mxPoint x="570" y="296" />
<mxPoint x="1040" y="296" />
</Array>
</mxGeometry>
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-11" value="振荡式容积泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="260" y="456" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-12" value="" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;" parent="1" source="flRVxpR7cwWonaM8a4Yf-6" target="flRVxpR7cwWonaM8a4Yf-11" edge="1">
<mxGeometry relative="1" as="geometry">
<Array as="points">
<mxPoint x="480" y="426" />
<mxPoint x="320" y="426" />
</Array>
</mxGeometry>
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-13" value="双转子式容积泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="420" y="456" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-14" value="" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;" parent="1" source="flRVxpR7cwWonaM8a4Yf-6" target="flRVxpR7cwWonaM8a4Yf-13" edge="1">
<mxGeometry relative="1" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-15" value="单转子容积式真空泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="600" y="456" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-17" value="隔膜泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="260" y="546" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-19" value="活塞泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="260" y="639" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-20" value="涡旋泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="260" y="726" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-21" value="罗茨泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="420" y="546" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-22" value="螺杆泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="420" y="636" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="flRVxpR7cwWonaM8a4Yf-23" value="爪式活塞" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" parent="1" vertex="1">
<mxGeometry x="420" y="726" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-1" value="液体喷射正" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" vertex="1" parent="1">
<mxGeometry x="600" y="542" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-3" value="旋片泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" vertex="1" parent="1">
<mxGeometry x="600" y="628" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-4" value="多单元泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" vertex="1" parent="1">
<mxGeometry x="600" y="714" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-5" value="旋转活塞泵<br>" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" vertex="1" parent="1">
<mxGeometry x="600" y="800" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-6" value="外部叶片泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#fff2cc;strokeColor=#d6b656;" vertex="1" parent="1">
<mxGeometry x="600" y="886" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-8" value="机械动能泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="820" y="456" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-33" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;exitX=0.5;exitY=1;exitDx=0;exitDy=0;entryX=0.5;entryY=0;entryDx=0;entryDy=0;" edge="1" parent="1" source="flRVxpR7cwWonaM8a4Yf-9" target="JQe-0Pjy612eNR-_QcZm-8">
<mxGeometry relative="1" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-10" value="气环泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="820" y="556" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-11" value="涡轮分子泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="820" y="637" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-12" value="轴向泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="820" y="719" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-13" value="径向泵<br>" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="820" y="801" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-14" value="分子泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="820" y="882" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-15" value="涡轮分子泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="820" y="964" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-17" value="推进泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="970" y="456" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-30" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;exitX=0.5;exitY=1;exitDx=0;exitDy=0;" edge="1" parent="1" source="flRVxpR7cwWonaM8a4Yf-9" target="JQe-0Pjy612eNR-_QcZm-17">
<mxGeometry relative="1" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-20" value="推进物喷射泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="970" y="556" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-21" value="液体喷射泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="970" y="637" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-22" value="气体喷射泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="970" y="719" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-23" value="蒸汽喷射泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="970" y="801" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-24" value="扩散泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="970" y="882" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-25" value="扩散喷射泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="970" y="964" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-26" value="离子传输泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#f8cecc;strokeColor=#b85450;" vertex="1" parent="1">
<mxGeometry x="1120" y="456" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-34" style="edgeStyle=orthogonalEdgeStyle;rounded=0;orthogonalLoop=1;jettySize=auto;html=1;exitX=0.5;exitY=1;exitDx=0;exitDy=0;entryX=0.5;entryY=0;entryDx=0;entryDy=0;" edge="1" parent="1" source="flRVxpR7cwWonaM8a4Yf-9" target="JQe-0Pjy612eNR-_QcZm-26">
<mxGeometry relative="1" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-28" value="吸附泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#dae8fc;strokeColor=#6c8ebf;" vertex="1" parent="1">
<mxGeometry x="1360" y="336" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-35" value="吸气泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#dae8fc;strokeColor=#6c8ebf;" vertex="1" parent="1">
<mxGeometry x="1360" y="456" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-36" value="巨大吸气泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#dae8fc;strokeColor=#6c8ebf;" vertex="1" parent="1">
<mxGeometry x="1360" y="558" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-37" value="升华蒸发泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#dae8fc;strokeColor=#6c8ebf;" vertex="1" parent="1">
<mxGeometry x="1360" y="659" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-38" value="离子吸气泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#dae8fc;strokeColor=#6c8ebf;" vertex="1" parent="1">
<mxGeometry x="1360" y="761" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-39" value="低温泵" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#dae8fc;strokeColor=#6c8ebf;" vertex="1" parent="1">
<mxGeometry x="1360" y="862" width="120" height="60" as="geometry" />
</mxCell>
<mxCell id="JQe-0Pjy612eNR-_QcZm-40" value="冷凝器" style="rounded=0;whiteSpace=wrap;html=1;container=0;fillColor=#dae8fc;strokeColor=#6c8ebf;" vertex="1" parent="1">
<mxGeometry x="1360" y="964" width="120" height="60" as="geometry" />
</mxCell>
</root>
</mxGraphModel>
</diagram>
</mxfile>